基于MEMS平面弹簧的微小载荷测试方法  

Measurement Method for Micro Load Based on MEMS Planar Spring

作　　者：吴健[1] 刘同冈[1] 刘帅[1] 商金玮 

机构地区：[1]中国矿业大学机电工程学院,徐州221116

出　　处：《纳米技术与精密工程》2014年第5期346-350,共5页Nanotechnology and Precision Engineering

基　　金：江苏省自然科学基金资助项目(BK20131114);中央高校基本科研业务费专项资金资助项目(2012QNA32);江苏省研究生培养创新工程资助项目(CXZZ12_0928)

摘　　要：本文提出一种微小载荷测量方法,搭建了基于MEMS平面弹簧的测量装置,主要由支撑臂、MEMS平面弹簧和激光位移探测器组成.通过激光位移探测器测量MEMS平面弹簧的微小变形,换算得到所施加的微小载荷.采用深反应离子刻蚀(DRIE)等微加工工艺制作了平面微弹簧,并对其进行理论计算和仿真模拟,给出了刚度范围,最后通过实际测量的方式进行了实验标定.结果显示:MEMS平面弹簧的标定刚度为7.88 mN/μm,其结果与理论及仿真结果较接近,测量精度可达0.08 mN.使用该装置和精密电子天平分别对10组微小质量试块进行测量,其平均误差率为5.75%.A measurement method for micro load based measurement device was built which contains fixed arm, on MEMS planar spring was introduced, and the MEMS planar spring and laser displacement sensor. The micro load can be obtained through measuring the micro deformation of MEMS planar spring by laser displacement sensor. The spring sample was first prepared with deep reactive ion etching （DRIE） , then the range of spring stiffness was provided by theoretical calculation and simulation, and finally the actual stiffness was calibrated by real measurement. The results show that MEMS planar spring stiffness is 7.88 mN/μm which is close to theoretical and simulation results, and the measuring accuracy of the device can reach 0.08 mN. The proposed device was compared with precision electronic balance by meas- uring 10 groups of micro samples, and the average error rate is 5.75%

关 键 词：MEMS 平面弹簧 微小载荷 刚度标定 测量精度 

分 类 号：TH-39[机械工程] TH135