面向芯片封装的直线电机精密定位控制技术研究  

Research on precision positioning control technology of linear motor for chip packaging

作　　者：夏链[1] 仇静[1] 陆爱明[1] 韩江[1] 

机构地区：[1]合肥工业大学机械与汽车工程学院,安徽合肥230009

出　　处：《合肥工业大学学报（自然科学版）》2014年第9期1025-1029,共5页Journal of Hefei University of Technology：Natural Science

基　　金：国家重大科技专项资助项目(2012ZX04001021)

摘　　要：为提高球栅阵列(BGA)芯片封装设备的封装精度和效率,构建高速高精直线电机运动平台,文章分析了永磁同步直线电机(PMLSM)的构造特点及数学模型,并在此基础上建立了直线电机伺服控制系统模型;采用全闭环伺服控制方式和PID+速度/加速度前馈的复合控制算法,研究复合控制算法对系统控制精度的影响。利用激光干涉仪测量该平台的X轴和Y轴定位精度分别为28.3μm和35.0μm,通过分段线性误差模型对平台的系统误差进行补偿,补偿后X和Y轴的定位精度比未补偿前分别提高了84.8%和77.2%。To improve the precision and efficiency of the ball grid array （BGA ） chip packaging ,a high speed and high precision positioning table driven by permanent magnet linear synchronous motor （PMLSM ） is devel-oped .According to the construction features and running principle of PMLSM ,the mathematical model of servo control system for linear motor is built .Based on the control algorithm of PID controller with velocity/acceleration feed-forward ,the closed-loop servo control strategy is adopted ,and then the influence of the new control algorithm on the control precision of the system is analyzed .The positioning precisions of X axis and Y axis measured by laser interferometer are 28.3 μm and 35 .0μm respectively .After the system error of the platform is compensated by using the piecewise linear error model ,the positioning precision of X axis and Y axis increases by 84.8% and 77.2% respectively .

关 键 词：永磁同步直线电机(PMLSM) 芯片封装 开放式运动控制器PMAC PID+前馈控制 

分 类 号：TH123[机械工程—机械设计及理论]