飞秒激光微加工中轴向超分辨相位板的设计及仿真  

Design and simulation of axial super-resolved phase plate in femtosecond laser microfabrication

作　　者：蔡建文[1,2,3] 

机构地区：[1]常州工学院光电工程学院,常州213002 [2]常州现代光电技术研究院,常州213002 [3]常州市光电子材料与器件重点实验室,常州213002

出　　处：《应用光学》2014年第5期908-911,共4页Journal of Applied Optics

基　　金：常州现代光电技术研究院开放课题(CZGY008)

摘　　要：为了提高激光微加工质量,对激光焦斑进行整形,采用菲涅尔衍射公式进行了理论分析,基于遗传算法和设计约束条件通过Matlab设计了两种二元相位元件,0-π结构四环相位板的归一化半径尺寸r1=0.15、r2=0.70、r3=0.81,非0-π结构四环相位板的归一化半径尺寸为r1=0.25、r2=0.498、r3=0.652,从内到外各环对应的相位为2.879、3.087、0、3.012,采用这两种位相板调制后的纵向光斑大小可压缩至艾丽斑的76%和75%,峰值能量比分别为0.39和0.42,旁瓣能量分别为0.64和0.41,这两种相位板均可应用于飞秒激光微加工。In order to improve the quality of laser micromachining,the focal spot should be shaped.The Fresnel diffraction formula was analyzed,two kinds of axial super-resolved phase plates were designed by using Matlab based on genetic algorithms and design constraints.The normalized radiuses of 0-πstructure phase plate of four-ring are r1=0.15、r2=0.70、r3=0.81,and the normalized radiuses of non-0-πstructure phase plate of four-ring are r1=0.25、r2=0.498、r3=0.652,the phases of each ring from the inside to the outside are 2.879、3.087、0、3.012.The longitudinal spot sizes after using the two phase plates are compressible to 76% and 75%of the Airy pattern,the ratios of the peak energy are respectively 0.39 and 0.42,and sidelobe energy are respectively 0.64 and 0.41.Two phase plates can be applied in femtosecond laser microfabrication.

关 键 词：微加工 轴向超分辨 相位板 飞秒激光 优化算法 

分 类 号：TN249[电子电信—物理电子学] O644[理学—物理化学]