聚碳酸酯表面碳基薄膜的制备及其光学性能研究  

Synthesis and Optical Behavior of Diamond-Like-Carbon Films on Polycarbonate

作　　者：程春玉[1] 蔺增[1] 王凤[2] 巴德纯[1] 

机构地区：[1]机械工程与自动化学院东北大学,沈阳110819 [2]沈阳发动机设计研究所,沈阳110015

出　　处：《真空科学与技术学报》2014年第9期890-895,共6页Chinese Journal of Vacuum Science and Technology

基　　金：辽宁省自然科学基金资助(201202058);中央高校基本科研业务费专项资金资助(N110403002);沈阳市科技基金资助(F13-295-1-00)

摘　　要：用射频等离子体增强化学气相沉积(RF-PECVD)方法在聚碳酸酯(PC)片上沉积类金刚石(DLC)薄膜,用射频磁控溅射方法制备过渡层以提高膜基结合力及控制光路。本文利用激光拉曼光谱检测薄膜的微观结构,利用X射线光电子能谱分析试样中元素组成,利用扫描电子显微镜观察薄膜的表面形貌,利用摩擦磨损试验机测试薄膜的摩擦学性能,利用紫外-可见光分光光度计研究试样在沉积碳膜后的光学性能。结果表明:利用RF-PECVD方法在PC片上沉积的薄膜为DLC薄膜,试样的摩擦系数与薄膜中sp3百分比有关,其光学特性与薄膜中sp2百分比有关,通过对不同过渡层的研究发现使用Si过渡层对形成高质量高透光率的DLC薄膜更加有利。The diamond-like-carbon（DLC）films were synthesized by RF plasma-enhanced chemical vapor deposition （RF-PECVD） ,on polycarbonate（PC） substrate pre-coated with RF magnetron sputtered Si/SiOx buffer layers. The influ- ence of the Si/SiOx buffer layers on the interfacial adhesion and properties of the DC films were investigated. The mi- cmstmctures and optical properties of the DCL coatings were characterized with scanning electron microscopy, Raman spectroscopy,X-ray photoelectron spectroscopy, and ultraviolet visible spectroscopy. The results show that the Si/SiOx buffer layer significantly improves the interfacial adhesion and transmittance of the DLC films. We found that the fractions of sp3 and sp2, which strongly influence the friction coefficient and transmittance of the DLC, respectively, can be con- trolled by adjusting the ratio of Ar/CH4 flow rates,sputtering power, and buffer layer thickness.

关 键 词：聚碳酸酯 含氢碳膜 射频等离子体增强化学气相沉积 摩擦学性能 光学性能 

分 类 号：TG115.58[金属学及工艺—物理冶金]