钛铝靶材的相结构对涂层的结构和性能的影响  

Effects of Phase Structure of TiAl Target's on Structure and Property of Coating

作　　者：穆健刚[1,2] 梁俊才 张凤戈[2] 王铁军[2] 赵栋梁[1] 

机构地区：[1]钢铁研究总院,北京100081 [2]安泰科技股份有限公司,北京100081

出　　处：《热加工工艺》2014年第18期143-146,共4页Hot Working Technology

基　　金：国家自然科学基金资助项目(51275323);国家科技重大专项资助项目(2012ZX04003011)

摘　　要：研究了完全合金化和完全未合金化钛铝靶材的结构,并研究了采用磁控溅射法,通氮气与不通氮气条件下沉积涂层的成分、结构和性能,探讨了不同相结构钛铝靶材与其沉积涂层在成分、结构和性能之间的关系。Alloyed and unalloyed TiAl target’s phase structure was studied. The coating was prepared by magnetron sputtering under nitrogen condition and vacuum condition. The composition, phase structure and property of coating were also studied. The relationship between them was discussed.

关 键 词：靶材 涂层 磁控溅射 

分 类 号：TG174.44[金属学及工艺—金属表面处理]