单电子晶体管用于电荷检测的研究  

Study of the Charge Detection by Single Electron Transistors

作　　者：苏丽娜[1,2] 吕利[2] 李欣幸[2] 秦华[2] 顾晓峰[1] 

机构地区：[1]江南大学电子工程系轻工过程先进控制教育部重点实验室,江苏无锡214122 [2]中国科学院苏州纳米技术与纳米仿生研究所纳米器件与应用重点实验室,江苏苏州215123

出　　处：《微纳电子技术》2014年第10期617-622,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(11074280);中国科学院科研装备研制项目(YZ201152);中央高校基本科研业务费专项资金(JUSRP51323B;JUDCF12032);江苏省产学研联合创新资金资助项目(BY2013015-19);江苏高校优势学科建设工程资助项目(PAPD);江苏省普通高校研究生创新计划资助项目(CXLX12_0724)

摘　　要：单电子晶体管可用作超灵敏电荷计进行高灵敏电荷检测。首先建立了单电子晶体管电荷检测的电路模型,阐释了其电荷检测机制;然后利用COMSOL和MATLAB软件对检测过程进行了模拟研究,分析了不同电荷量和检测距离时单电子晶体管库仑岛的电势,并研究了电荷量、检测距离及电荷间静电耦合对单电子晶体管电导的影响。结果表明,单电子晶体管电荷检测时工作点和检测距离决定其电荷检测的量程,最佳检测距离应设置在电导-距离曲线的斜率最大处。Single electron transistor（SET）can be used as ultra-sensitive electrometer to detect the variation of the high sensitive charge.The circuit model of the SET for the charge detection was established,and the charge detection mechanism was analyzed.Then,the detection process was simulated and studied by the COMSOL and MATLAB softwares.The Coulomb island potential of the SET was analyzed at different charges and detection distances,and the effects of charge,detection distance and electrostatic coupling between charges on the electrical conductance of the SET were analyzed.The results indicate that during the charge detection of the SET,the charge detection range of the SET is determined by the operating point and the detection distance.The optimal detection distance should be set at the point of maximum slope of the conductance-distance curve.

关 键 词：单电子晶体管(SET) 库仑岛 电荷计 电荷检测 静电耦合 

分 类 号：TN302[电子电信—物理电子学] TN389