基于差分图像定位法的集成电路光发射探测技术  

Differential Image Localization Method for IC PEM

作　　者：林晓玲 练建文 章晓文 姚若河[2] 

机构地区：[1]工业和信息化部电子第五研究所电子元器件可靠性物理及其应用技术重点实验室,广东广州510610 [2]华南理工大学电子与信息学院∥微电子研究所,广东广州510640

出　　处：《华南理工大学学报（自然科学版）》2014年第9期70-75,共6页Journal of South China University of Technology(Natural Science Edition)

基　　金：国家自然科学基金资助项目(60776020);电子元器件可靠性物理及其应用技术重点实验室基金资助项目(9140A23090112DZ15284)

摘　　要：在偏置电压较低的情况下,光发射信号较弱,容易被器件的噪声所干扰,造成成像效果不佳.为此,文中建立了光发射显微(PEM)图像的信号-噪声模型,设计了差分图像定位算法来提高光发射探测的精度.该算法首先通过调整偏置电压获取失效信号强度不同的两组图像,计算出两组图像的差分均值图像,再对其进行均值滤波器、图像二值化等处理,得到统计图像,最后根据统计图像确定集成电路失效点的位置.物理分析结果验证了基于差分图像定位法的集成电路光发射探测技术的准确性.When the bias voltage is low,PEM（Photon Emission Microscopy） failure signal is weak and is easy to be influenced by noise,which results in a poor quality of PEM image.In order to solve this problem,a signal-noise model of PEM image is established,and a differential image localization algorithm is designed to improve the PEM precision.First,this algorithm acquires two groups of images with different failure signal strengths by adjusting the bias voltage.Then,the average differential image of these two group images is calculated and dealt with by means of mean filter and image binarization,thus obtaining a statistical image.Finally,IC failure points can be effectively located according to the statistical image.Physical analysis demonstrates the accuracy of IC PEM based on the proposed differential image localization algorithm.

关 键 词：集成电路 差分图像法 信号-噪声模型 光发射 缺陷定位 

分 类 号：TN322.8[电子电信—物理电子学]