用于微纳米几何量尺寸测量的三维微接触式测头  

Research on 3D micro tactile probe for microand nanometer dimensional measurement

作　　者：李源[1] 吴俊杰[1] 

机构地区：[1]上海市计量测试技术研究院

出　　处：《上海计量测试》2014年第5期2-5,共4页Shanghai Measurement and Testing

基　　金：国家质检总局公益专项(201110051)

摘　　要：为实现微纳尺度器件三维几何形貌测量及表征,基于电容和压阻原理,开发了两种三维微接触式测头。其中电容测头测量范围4.5μm,轴向分辨力和横向分辨力分别为10 nm和25 nm;压阻测头测量范围4.6μm,轴向分辨力和横向分辨力分别为5 nm和10 nm。两种测头均可集成到纳米测量机,实现微结构几何参数的测量。In order to realize dimensional measurement and cbarac- tcrization of miniaturized components in micro/nano scale, two 3D micro tactile probes were developed based on capacitive and piezo-resistive principle. Range of capacitive probe is 4.5 μ m, with a resolution of 10 nm and 25 nm in axial and lateral direction, respectively. The piezo- resistive probe has an axial and lateral resolution of 5 nm and 10 nm in full range of 4.6 μ m. The two probes can be integrated to nano measuring machine to realize measurement of geometrical parameter in

关 键 词：微接触式测头 电容传感器 压阻传感器 纳米测量机 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]