运放对压电陶瓷驱动电路系统精度影响的研究  

Study on the impact of operational amplifier on system accuracy of the PZT driving circuit

作　　者：王学亮[1] 李佩玥[1] 郑楠[1] 崔洋[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《电子测量技术》2014年第10期33-36,共4页Electronic Measurement Technology

基　　金：国家重大科技专项02专题(2009ZX02205)项目

摘　　要：为了在光刻机投影物镜中使用压电陶瓷对像质补偿镜组进行精密定位,设计了一种以集成运算放大器构成的压电陶瓷驱动电路。针对光刻物镜中压电陶瓷的亚微米量级高精度定位要求,研究了驱动电路的系统精度要求,并对系统误差进行分解,着重分析了运算放大器放对系统精度的影响。首先,分析运放失调误差的影响;其次,使用PSpice仿真获得运放的固有频率特性,分析工作带宽下运放有限开环增益的影响;然后,对运放反馈网络的影响进行分析;最后,分析运放输出噪声的影响。计算表明,在最坏情况下该压电陶瓷驱动电路中由运算放大器引起的系统误差小于130mV,满足系统误差分配的要求。试制了系统样机并进行了验证实验,实验结果表明由运放引起的系统误差不超过100mV,与理论分析的结果符合。A PZT driving system which contains an operational amplifier was designed in order to use the PZT as the positioning actuators of the image quality compensator in a lithographic objective. According to the specific requirement of the positioning accuracy at the level of sub-micrometer, the output accuracy and error components of the driving system were studied, and the impact of the operational amplifier on the system accuracy was analyzed emphatically. Firstly, the impact of the offset error of operational amplifier on the system accuracy was analyzed. Secondly, the inherent frequency characteristics of operational amplifier was simulated by PSpice and then the impact of the finite open-loop gain of operational amplifier on system accuracy was analyzed. Finally, the impact of the feedback network and the noise was discussed. As analyzed, the system error caused by operational amplifier was less than 130mV even under the worst circumstance, which fulfilled the requirement of system error decomposition. A prototype was manufactured and tested in experiment. The experiment result showed that system error caused by the operational amplifier was under 100mV, which corroborated the theoretical analysis.

关 键 词：光刻物镜 压电陶瓷 驱动电路 误差分析 亚微米 

分 类 号：TN722.77[电子电信—电路与系统]