用于非球面检验的激光直写高精度计算全息图制作  

Fabrication of High Precision Computer Generated Hologram for Aspheric Surface Testing by Laser-Direct Writing

作　　者：赵龙波[1,2] 张志宇[1] 朱德燕[1,2] 王延超[1,2] 郑立功[1] 张学军[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《激光与光电子学进展》2014年第11期122-128,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(51305422);国家973计划(2011CB013200)

摘　　要：为实现高精度非球面的面形误差检测,对激光直写计算全息图(CGH)的关键技术进行研究。以获得最小线宽偏差为目的,通过基础工艺实验,探究离焦量对光刻胶上线宽的影响;研究湿法刻蚀过程对不同线宽引入的展宽规律;分析线宽误差与位置误差关系,得到CGH不同周期位置误差引入的波前误差。根据实验结果,制作最小线宽1.8 mm,直径80 mm的振幅型CGH。检测结果表明,波前误差均方根值为0.011l,达到l/100量级,可用于高精度非球面的检测。In order to realize high- precision testing of aspherical surface, the key technology for fabricating computer generated hologram（CGH） by laser- direct writing（DWL） is studied in this paper. To obtain the minimum line-width deviation, the influences of defocus and the wet-etching processes on the line-width are firstly investigated. The position errors under different line-widths are obtained by analyzing the relationship of line-width error and the position error. According to the above-obtained results, a CGH with diameter of 80 mm and the minimum line-width of 1.8 mm is successfully fabricated. Testing results show that the wavefront error is only 0.011 l, achieving the l/100 level. The fabricated CGH is expected to be used in the high-precision testing of asphercal surfaces.

关 键 词：全息 衍射光学元件制作 线宽 非球面检验 

分 类 号：O439[机械工程—光学工程]