屏蔽阳极模板随动式微细电铸的定域性研究  

Localization of Micro Electroforming by Using Movable Patterned Anode

作　　者：曾永彬[1] 胡洋洋[2] 曲宁松[1] 

机构地区：[1]南京航空航天大学机电学院,南京210016 [2]中国电子科技集团公司第二十八研究所,南京210007

出　　处：《南京航空航天大学学报》2014年第5期786-792,共7页Journal of Nanjing University of Aeronautics & Astronautics

基　　金：国家自然科学基金(51375238)资助项目;江苏省自然科学基金(BK20131361)资助项目

摘　　要：屏蔽阳极模板随动式微细电铸技术是一种新颖的金属微结构加工方法,具有工艺简单、成本低以及高深宽比微结构加工能力的优点。电沉积定域性是影响其复制精度和分辨率的核心因素。对电沉积定域性进行了理论分析和实验研究,结果表明:极间距对定域性的影响较大,杂散沉积宽度随着极间距线性增大;而在极间距一定时,极间电压(即电沉积电流密度)、屏蔽胶膜厚度及微槽特征宽度不影响电沉积的定域性。Micro electroforming by using a movable patterned anode is a novel process to fabricate metal microstructure,which is simple,cost effective and able to fabricate high-aspect-ratio microstructure.The accuracy and resolution of the proposed micro electroforming process are significantly affected by the localization of electrodeposition.The localization of electrodepositon is studied theoretically and experimentally.The results indicat that the width of stray deposition is proportionally linear to the gap between the anode and the cathode; however,it has nothing to do with the current density,the thickness of the anode insulation layer and the width of the feature.

关 键 词：微细电铸 定域性 微结构 

分 类 号：TQ153.44[化学工程—电化学工业]