聚焦离子束加工单晶体金刚石刀具实验研究  

Experimental Research on Fabrication of Single Crystal Diamond Tool Based on Focused Ion Beam Technology

作　　者：徐宗伟[1] 李万里[1] 兀伟[1] 贾瑞丽[1] 徐博良 

机构地区：[1]精密测试技术及仪器国家重点实验室(天津大学),天津300072

出　　处：《纳米技术与精密工程》2014年第6期424-428,共5页Nanotechnology and Precision Engineering

基　　金：国家重点基础研究发展计划(973计划)赞助项目(2011CB706700);国家自然科学基金资助项目(51275559);中国工程物理研究院超精密加工技术重点实验室开放基金资助项目(KF13008)

摘　　要：作为超精密切削加工刀具的理想材料,单晶体金刚石材料的加工制造方法直接决定了刀具切削加工表面的精度和质量.由于金刚石材料具有明显的各向异性,在传统的金刚石刀具机械刃磨法中需要综合考虑制备工艺和刀具性能的协同关系,主要包括不同晶面表现出显著的物理机械性能差异、不同晶向存在显著的难磨和易磨方向等.本文针对聚焦离子束(FIB)技术加工金刚石刀具的过程中,金刚石材料性质对聚焦离子束加工质量、加工效率的影响规律等关键工艺开展了研究.研究发现,与传统的机械刃磨法相比,聚焦离子束加工是基于高能离子束的轰击溅射实现材料的去除,聚焦离子束加工中存在的级联碰撞现象显著弱化了金刚石材料各向异性的影响.Single crystal diamond is recognized as the ideal material for ultra-precision cutting tools,and the diamond cutting tools ’machining method directly determines its machining accuracy and surface quality. The diamond material has a significant anisotropy property,which shows dramatically different mechanical properties along different crystal planes and crystal orientations,which significantly affects the cutting tools’ machining efficiency and quality in the traditional mechanical grinding method. In this paper,single crystal diamond was machined by focused ion beam（ FIB） method,and the effect of anisotropy property of diamond material on the FIB machining quality and machining efficiency were analyzed.Compared with traditional mechanical grinding method,FIB machining efficiency and quality shows good uniformity among different crystal planes and orientations,which is mainly attributed to FIB cascade collision fabrication mechanism and FIB nanoscale fabrication capability.

关 键 词：金刚石刀具 聚焦离子束 晶面晶向 

分 类 号：TG71[金属学及工艺—刀具与模具]