Au/Ni/Cu多层薄膜热带海洋气候腐蚀失效机制研究  

Study on Corrosion Failure Mechanism of Au / Ni / Cu Multilayer Film in the Tropical Marine Climate

作　　者：李云双[1,2] 曹江利[1] 姚文清[2] 严楷[1,2] 陈拥军[3] 

机构地区：[1]北京科技大学新材料技术研究院,北京100083 [2]清华大学化学系,北京100084 [3]海南大学材料与化工学院,海口570228

出　　处：《表面技术》2014年第6期43-47,74,共6页Surface Technology

基　　金：科技部创新方法工作专项(2012IM030500)~~

摘　　要：目的了解Au/Ni/Cu多层金属薄膜在热带海洋气候下的失效机制,为研究电子元器件表面腐蚀失效的早期预警提供参考。方法采用磁控溅射法在p型单晶Si(100)基片上沉积Au/Ni/Cu薄膜,在热带海洋气候环境下进行时效实验,采用原子力显微镜及俄歇电子能谱对薄膜失效表面与界面结构微观变化进行研究。结果时效实验初期,Au/Ni/Cu薄膜表面发生了Au原子聚集,形成了不再连续的岛状结构,岛与岛之间产生了表面微裂纹。随着时效时间的延长,表面形成腐蚀洞,腐蚀洞附近有Ni和Cu扩散至Au层表面。时效时间进一步延长后,腐蚀洞的数量增加,面积增大,此时样品处于腐蚀末期;与此同时,在未产生腐蚀洞的区域,Au/Ni/Cu薄膜界面未出现明显粗化。结论 Au/Ni/Cu薄膜在热带海洋气候中的失效主要是通过表面产生的腐蚀洞进行的。Objective To investigate the failure mechanism of Au/Ni/Cu muhilayer film in the tropical marine climate, so as to provide reference for the research on the early warning of corrosion failure in electron components. Methods In this study, magnetron sputtering was used to develop Au/Ni/Cu thin film on p type single crystal Si（100） substrate. The surface and interface structure changes of Au/Ni/Cu thin films in the tropical marine climate were studied using atomic force microscopy （AFM） and Auger electron spectroscopy （AES）. Results In the early stage of aging treatment, Au atoms aggregated on the Au/Ni/Cu thin film surface and formed discontinuous island structure and micro-cracks around the islands. With the increase of aging time, Ni atoms and Cu atoms diffused to the surface of the Au layer near the corrosion holes formed in the films. As the aging time increased further, the number of the corrosion holes increased, and the corrosion hole area was enlarged, at this time the samples were in the terminal stage of corrosion. In the meantime, no obvious coarsening was observed at the interface of Au/Ni/Cu thin film in the areas away from the corrosion holes. Conclusion The failure of Au/Ni/Cu thin film in tropical marine climate mainly proceeded through surface corrosion hole.

关 键 词：金属薄膜 热带海洋气候 腐蚀失效 表面缺陷 界面结构 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TG172.3[金属学及工艺—金属学]