基于InP材料的纳米光栅耦合器的耦合效率分析  

Analysis of Coupling Efficiency of Nano Grating Coupler Based on InP Material

作　　者：刘耀英[1,2] 薛晨阳[1,2] 崔晓文 崔丹凤[1,2] 韦丽萍 王永华[1,2] 李艳娜 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室 [2]电子测试技术重点实验室,山西太原030051

出　　处：《量子光学学报》2014年第4期337-341,共5页Journal of Quantum Optics

基　　金：国家自然科学基金(61275166;61076111)

摘　　要：设计了一种基于InP材料的纳米光栅耦合器,运用FDTD算法分析了周期长度、刻蚀深度以及占空比变化时该光栅耦合器的耦合效率。计算结果表明,周期长度为800nm,刻蚀深度为0.3μm,占空比接近0.5时,耦合效率可以达到13%。本文所设计的光栅耦合器对构建基于InP材料的谐振腔、激光器和陀螺结构具有一定的理论指导意义。A InP-based nano-grating coupler was designed. Using the finite difference time domain （FDTD） algorithm, the coupling efficiency of the grating coupler was analyzed when the cycle, the groove depth and the duty cycle were changed. The result showed that the coupling efficiency can reach to 13% when the cycle is 800 nm, the groove depth is 0.3 μm and the duty cycle is close to 0. 5. The grating coupler designed in this paper provided a theoretical guiding for the construction of resonator,laser and gyro structure based on InP material.

关 键 词：INP材料 光栅 FDTD算法 耦合效率 

分 类 号：TN256[电子电信—物理电子学]