基于拉曼光谱的类金刚石薄膜的热稳定性研究  

Thermal stability study of diamond-like carbon thin films by using Raman spectroscopy

作　　者：张在珍[1] 张兆贵[1] 

机构地区：[1]潍坊工程职业学院应用化学与生物工程学院,山东潍坊262500

出　　处：《河北工业科技》2014年第4期302-305,共4页Hebei Journal of Industrial Science and Technology

摘　　要：利用阴极真空弧放电设备制备了表面光滑的类金刚石薄膜材料,通过多波长激发的拉曼光谱研究了不同退火条件下所制薄膜的热稳定性。实验结果表明,在小于400℃的温度处理下,类金刚石薄膜微观结构几乎不发生变化,薄膜处于稳定区;当温度升高至600℃,微观结构开始发生微妙的变化,认为处于亚稳定区;当温度升至800℃甚至1 000℃时,类金刚石薄膜的微观结构发生显著变化,薄膜开始出现石墨化,物理性质不能保持稳定。Smooth diamond like carbon （DLC） thin films are fabricated on silicon substrate by using tilted cathodic vacuum arc （FCVA） deposition system. DLC thin films thermal stability is studied by using multi-wavelength laser excited by Raman spec- troscopy. The experiment shows that thin films＇ microscopic structures can remain unchanged and stable when the films are thermally processed at a temperature of below 400 ℃. When the process temperature is raised to 600 ℃, the DLC films＂ atomic contents start to undergo subtle transformation, which is reviewed as metastable state. When the temperature is raised to 800-1 000 ℃, DLC films start to change dramatically, and they will be graphitized and their physical characteristics cannot keep relatively stable.

关 键 词：类金刚石薄膜 拉曼光谱 热稳定性 

分 类 号：TQ164[化学工程—高温制品工业]