小型离子阱技术及其航天应用进展  

Technology of miniature ion trap and its space application progress

作　　者：李琦[1] 邓一兵[1] 黄刚[1] 

机构地区：[1]中国航天员科研训练中心,北京100094

出　　处：《传感器与微系统》2014年第12期10-12,16,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(21175121)

摘　　要：公共治安、食品安全、环境保护、工业生产过程监测和载人航天及深空探测等领域急需微小型质谱仪,用于成分在线检测与分析。离子阱质谱仪较其他质谱仪具有真空度要求低、操作灵活和串联质谱性能良好等优点,更加适合进行小型化和微型化。对小型离子阱质谱、MEMS离子阱质谱的发展及其在航天领域的应用进行总结,试图找出制约离子阱质谱小型化发展的主要技术瓶颈,并提出了解决途径。最后对微小型离子阱的发展及其在航天领域的应用前景进行了展望。The fields of public security, food security, environmental protection, industrial process monitoring and manned space and explorations need miniature mass spectrometers in emergency, which is used for on-line detection and analysis of composition. The vacuum degree requirement of ion trap mass spectrometer is lower than those of other mass spectrometer, and operating performance of ion trap mass spectrometer（MS） has advantages such as flexible and tandem MS, more suitable for miniaturization and micromation. Miniature ion trap mass spectrometer, development of MEMS ion trap mass spectrometer and its application in field of space are summarized, main technical bottlenecks of ion trap mass spectrometer in miniaturization is tried to find out and solutions are put forward. In the end, development of miniature ion trap and its application prospect in the field of space is discussed.

关 键 词：微机电系统 质量分析器 小型化 离子阱 航天 

分 类 号：TH162[机械工程—机械制造及自动化]