Pd-Cr薄膜应变计的研制  

Fabrication and Test of Pd-Cr Thin Film Strain Gauges

作　　者：周勇[1] 李超[1] 宋阳[1] 蒋书文[1] 

机构地区：[1]电子科技大学,电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《仪表技术与传感器》2014年第10期105-107,共3页Instrument Technique and Sensor

摘　　要：采用射频磁控溅射法在镍基高温合金拉伸件上制备Pd-Cr薄膜应变计.研究了800℃大气退火对Pd-Cr薄膜结构、表面形貌、方决电阻的影响,并且测试了Pd-Cr薄膜应变计的电学及应变性能.结果表明：Pd-Cr薄膜是一种结构为面心立方的单相材料.800℃大气退火后,Pd-Cr薄膜表面生成一层致密的Cr2O3,且薄膜方阻减小.在20～400℃范围内,应变计电阻同温度呈线性变化,电阻温度系数（TCR）约为230 ～ 260 ppm/℃.室温和300℃下的灵敏系数（GF）分别为1.97和2.63.Pd-Cr thin film strain gauges were deposited on the nickel-based superalloy by radio-frequency magnetron sputte- ring. The effects of annealing in air at 800 ℃ on structure, surface morphology and sheet resistance of Pd-Cr thin films were investi- gated and the electromechanical properties of Pd-Cr thin film strain gauges were measured. The results show that the Pd-Cr thin film is a single phase material of fee lattice. A layer of dense Cr2 03 is formed on the surface of Pd-Cr thin film and the sheet resistance decreases after annealing in air at 800℃. The variation of strain gauge resistance with temperature is linear in the temperature range of 20 ~ 400℃. The temperature coefficient of resistance （TCR） is about 230 - 260 ppm/℃. The gauge factor （GF） is about 1.97 at room temperature and 2. 63 at 300 ℃.

关 键 词：磁控溅射 Pd—Cr 薄膜应变计 灵敏系数 电阻温度系数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]