碳源体积分数对BDD薄膜制备和性能的影响  

Effects of the Carbon Source Volume Fraction on the Preparation and Properties of Boron Doped Diamond Thin Films

作　　者：张男男[1] 檀柏梅[1] 高宝红[1] 程川[1] 杨志欣[1] 

机构地区：[1]河北工业大学微电子研究所,天津300130

出　　处：《微纳电子技术》2014年第12期807-810,共4页Micronanoelectronic Technology

基　　金：02重大专项(2009zx02308-003)

摘　　要：以丙酮为碳源,采用热丝化学气相沉积(HFCVD)技术在钽衬底上制备p型硼掺杂金刚石(BDD)薄膜电极。在BDD电极制备过程中,碳源体积分数对它的质量和性能影响很大。利用AFM和XRD分析了丙酮体积分数对BDD电极表面形态和成膜质量的影响。利用循环伏安法研究了采用不同体积分数的丙酮沉积的BDD电极对电化学窗口和背景电流的影响。分别采用BDD电极和不锈钢片作阳极和阴极电解K2SO4溶液,并利用KMnO4滴定法检测BDD电极的氧化效率。结果表明,优化丙酮体积分数可以提高BDD的均匀性和附着力。合适的丙酮体积分数所制备的BDD电极具有电化学窗口宽、背景电流低和电极氧化效率高等特点,有很好的应用前景。With acetone as the carbon source, the p-type boron doped diamond （BDI）） thin film electrode on tantalum substrate was prepared by hot filament chemical vapor deposition （HF- CVD） technique. In the process of preparing the BDD electrode, the carbon source volume frac- tion has a great influence on the quality and performance of the BDD electrode. The effects of the acetone volume fraction on the surface morphology and thin film quality of the BDD electrode were analyzed by the AFM and XRD. The influences of the BDD electrode deposited by different volume fractions of acetone on the electrochemical window and background current were investi- gated by the cyclic voltammetry. The BDD electrode and stainless steel sheets were respectively served as the anode and cathode to electrolyze K2 SO4 solution, and the oxidation efficiency of the BDD electrode was detected by KMnO4 titration. The result shows that the uniformity and adhe- sion of the BDD can be improved by optimizing the volume fraction of acetone. The BDD electrode prepared by the optimal volume fraction of acetone has the wide electrochemical window, low background current and high electrode oxidation efficiency, and has a good application prospect.

关 键 词：丙酮体积分数 热丝化学气相沉积(HFCVD) 硼掺杂金刚石(BDD)薄膜 电化学 氧化效率 

分 类 号：TN304.18[电子电信—物理电子学] TN304.055