基于离子渗铌过渡层的金刚石刀具涂层结合性能研究  

Adhesion Performance of Diamond Tool Coating Based on the Niobium Interlayer Obtained by Double-Glow Plasma Alloying

作　　者：徐俊华[1] 徐锋[1] 刘召志 赵先锐[1,2] 卢文壮[1] 左敦稳[1] 

机构地区：[1]南京航空航天大学机电学院,南京210016 [2]台州学院物理与电子工程学院,台州317000

出　　处：《人工晶体学报》2014年第10期2522-2527,共6页Journal of Synthetic Crystals

基　　金：国家自然科学基金资助项目(51005117);浙江省工具刃具重点实验室开放基金(ZD201205)

摘　　要：对含钴量10wt%的硬质合金刀片进行酸碱两步法预处理后采用双辉离子渗技术在表面渗铌过渡层,采用热丝化学气相沉积金刚石涂层。通过SEM、Raman等手段表征涂层形貌和质量,用压痕法检测膜基结合性能,研究了该预处理方法对金刚石生长及其结合性能的影响。结果表明,相比传统的过渡层制备方法,双辉离子渗技术具有更大的优势,铌过渡层填补了酸碱两步法产生的孔隙,在高温作用下向基体内部扩散并浸润WC颗粒,与基体结合紧密,减小了疏松层厚度,同时阻挡了Co的扩散,提高了形核密度并细化了金刚石晶粒,涂层质量和膜基结合性能得到改善。The WC-10wt% Co inserts were pretreated by a two-step process firstly and deposited niobium interlayer by double-glow plasma alloying,and then diamond films were deposited by hot filament chemical vapor deposition process. The diamond films were characterized by scanning electron microscope（ SEM） and Raman scattering spectroscopy（ Raman）,and the adhesion strength was tested by indentation method. The effects of this pretreatment on diamond growth and adhesion were studied. The results show that double-glow plasma alloying has an advantage over other interlayer preparation methods,the sample pretreated by two-step process combined with interlayer has the better adhesion performance because the niobium interlayer fills up holes caused by the two-step process and diffuses into the inside of the substrate and infiltrates the WC particles at high temperature,so it combines with the substrate strongly,and the thickness of the loose layer has been lessened. Moreover,the niobium interlayer also restrains the diffusion of Co,enhances the diamond nucleation and promotes the formation of better shape crystals,therefore quality and adhesion of the diamond film improved.

关 键 词：双辉离子渗 铌过渡层 CVD 金刚石 硬质合金 

分 类 号：TG74[金属学及工艺—刀具与模具]