平面微弹簧性能比较研究  

Study of Planar Micro-spring Performance Comparison

作　　者：程建建[1] 聂伟荣[1] 周织建[1] 黄庆武[1] 

机构地区：[1]南京理工大学机械工程学院,江苏南京210094

出　　处：《机械制造与自动化》2014年第6期14-17,共4页Machine Building & Automation

摘　　要：针对平面微弹簧性能比较方法的缺乏,提出了弹簧柔度性能比较系数,通过在相等的弹簧占用结构面积情况下,分析C型、S型以及W型弹簧中任意两种弹簧柔度系数比的对数值分布情况。利用仿真软件验证了公式正确性,分析表明弹簧柔度性能比较系数理论值与仿真值相对误差小于5%。分析表明在S型弹簧与C型弹簧柔度性能比较系数以及C型弹簧与W型弹簧柔度性能比较系数为零情况下,弯梁夹角和弯半径与直粱(弯梁等效直粱长度)比值无关;在S型弹簧与C型弹簧柔度性能比较系数为零情况下,随夹角增大,弯半径与直粱比值先增大后减小。弯半径与直粱比值大小影响C型、S型、W型弹簧单位结构面积柔度系数顺序排列。Due to lack of performance comparison method for planar micro spring, this paper proposes the performance comparison coefficient of the spring. Based on spring occupying equal area of structure, the compliance ratio logarithm distribution of any two of C-shaped, S-shaped, and W-shaped springs is analyzed. By use of the simulation software, the correctness of the formulas is veri-fied. The analytic result that its theoretical value and simulation value are less than 5% for the spring coefficient of compliance per-formance comparison. When the comparison coefficients of S-shaped and C-shaped spring and the C-shaped and W-shaped spring are zero, the angle of bending beam is irrelevant to the ratio of bend radius and straight beam （ bending beam length is equivalent to straight beam） . When the comparison coefficient of S-shaped and C-shaped spring is zero, the ratio of bend radius and straight beam increases initial y and then decreases along with the angle increasing. The ratio of bend radius and straight beam affects the sequence of the compliance of C-shaped, S-shaped, and W-shaped spring.

关 键 词：微机电系统 弹簧性能比较系数 柔度系数 结构面积 

分 类 号：TH703.1[机械工程—仪器科学与技术]