类金刚石薄膜对Low-E膜系的保护作用分析  

Effect of the Diamond-Like Carbon Film on the Protection of Low-E Film

作　　者：陈玮[1] 刘超英[1] 徐志伟[1] 付静[1] 穆元春[1] 张凡[1] 张洋[1] 

机构地区：[1]中国建筑材料科学研究总院,北京100024

出　　处：《玻璃与搪瓷》2014年第6期14-18,4,共6页Glass & Enamel

基　　金：国家"十二五"科技支撑计划资助项目(2011BAJ04B04)

摘　　要：采用射频等离子体增强化学气相沉积法(RF-PECVD),在Low-E玻璃表面沉积类金刚石(DLC)薄膜作为保护层,通过耐洗刷试验和耐酸腐蚀试验研究了DLC薄膜对Low-E膜系的保护作用;同时对镀DLC薄膜的Low-E玻璃进行热处理,研究热处理后Low-E玻璃膜层结构、低辐射性能和光学性能的变化;然后通过摩擦磨损实验对镀DLC膜提高Low-E玻璃耐洗刷的原因进行分析。结果表明:DLC膜能够有效提高Low-E玻璃耐洗刷性和耐酸腐蚀性;并且DLC膜可以通过热处理去除,且热处理后的Low-E低辐射性能和光学性能未受到影响;一定厚度DLC膜能够有效降低Low-E玻璃摩擦系数,是提高Low-E玻璃耐磨性的主要原因。The diamond-like carbon （DLC） was deposited on the Low-E glass surface as a protective layer by using the radio frequency plasma enhanced chemical vapor deposition technique.Through the wash-off resistance and acid resistance tests the effect of DLC films on protection of Low-E film was investigated.Low-E glass with DLC film was subjected to heat treatment,and then the layer structure,low emission properties and optical properties were examined.The wash-off resistance of Low-E glass was analyzed through abrasion test.The results show that the DLC film can significantly improve the wash-off resistance and acid corrosion resistance of Low-E glass; and DLC film can be removed by heat treatment.Moreover,the low emission and optical properties remained unaffected after the heat treatment.So DLC film with a certain thickness can effectively reduce the friction coefficient of the low -e glass that is the main reason why the abrasive resistance of Low-E glass can be remarkably improved.

关 键 词：类金刚石薄膜 LOW-E玻璃 耐洗刷 耐腐蚀性 热稳定性 

分 类 号：TB43[一般工业技术]