白光干涉自动测量砂轮表面时干涉区间的确定  

Determination of Interference Range for Grinding Wheels Topography Measurement in White Light Interference

作　　者：张遨 崔长彩[1] 余卿[1] 叶瑞芳[1] 黄辉[1] 黄春棋[1] 

机构地区：[1]华侨大学机电及自动化学院,福建厦门361021

出　　处：《仪表技术与传感器》2014年第12期110-113,共4页Instrument Technique and Sensor

基　　金：国家自然科学基金重点项目资助(NO.51235004);国家自然科学基金项目资助(NO.51075160);教育部长江学者和创新团队发展计划资助(NO.PCSIRT1063);教育部"新世纪优秀人才支持计划资助(NO.NCET-10-0116)";中央高校基本科研业务费专项资金资助(NO.JB-GJ1002)

摘　　要：用白光干涉仪自动测量金刚石砂轮表面形貌时,为了获得更精准的干涉区域,在干涉仪所采集到的一系列图像中,首先通过计算相邻的2张图像各像素灰度值的变化从而得到一系列新的灰度图像。然后计算每帧新图像的非零点像素的均值和极值,据此计算得出用于确定干涉区域的阈值以实现自动扫描。实验表明:此方法运算速度较快,而且对局部区域的干涉更敏感,可以更精确地搜索出干涉区间。采用步进电机和压电陶瓷二级驱动,可以在100 s内实现100μm范围内扫描区间的自动获取并实现垂直方向的数据采集。In order to improve the effectiveness in white light interferometer （WLI） for diamond grinding wheels topography measurement,first,the intensity change of each pixel among two adjacent images in the series of images captured by the WLI was calculated to get a new series of grayscale images. A threshold was obtained by calculating the mean and the extreme value of non- zero pixels of each new image. According to this threshold, the interference area could be found to realize the automatic scanning. Experiments show that it is more sensitive to local interference area and can get a more accurate interference range at a fast rate u- sing this algorithm. Adopting the stepper motor and piezoelectric ceramic transducer, an automatic scanning and vertical sampling within the range of 100 μm can be completed in 100 seconds.

关 键 词：白光干涉 自动扫描 砂轮 图像处理 干涉条纹 帧差法 

分 类 号：TP271[自动化与计算机技术—检测技术与自动化装置]