现场真空漏孔校准装置的设计  

DESIGN OF VACUUM LEAK CALIBRATION APPARATUE IN SITE

作　　者：赵澜[1] 冯焱[1] 成永军[1] 张涤新[1] 杨长青[1] 张瑞芳[1] 董猛[1] 孙雯君[1] 

机构地区：[1]兰州空间技术物理研究所国防科技工业真空一级计量站,甘肃兰州730000

出　　处：《真空与低温》2014年第6期357-359,368,共4页Vacuum and Cryogenics

摘　　要：为了减小现场环境与校准环境的差异对真空漏孔校准的影响，通过理论研究，设计了现场真空漏孔校准装置，可实现对真空漏孔的现场校准。考虑到现场真空漏孔校准装置需便于携带及搬运，装置的设计采用了分体式结构。现场真空漏孔校准装置由抽气系统、校准室系统、真空漏孔连接系统、流量输出系统、充气系统、定容室与压力测量系统及烘烤系统等7个部分组成，复合了定容法及固定流导法两种校准方法，预计真空漏孔校准范围为5＆#215;10-10～5＆#215;10-5 Pa？m3/s，合成标准不确定度为10％。In order to reduce the influence of the discrepancy between in site and calibration environment on the cali-brated results,a vacuum leak calibration apparatus,which can be used to calibrate vacuum leak in site,was designed with the help of theoretical calculation.The modularization and split architecture was utilized in designing the apparatus in order to take-down and transportation easily. The calibration apparatus consists of pumping system,flow calibration system,vac-uum leak joint system,output system,charge gas system,constant-volume and pressure measurement system,and bake system together,and this apparatus can adopt two methods such as constant-volume method and constant conductance method to calibrate vacuum leak. The expected calibration range of the apparatus in operational site is 5＆#215;10-10~5＆#215;10-5 Pa？m3/s with a combined standard uncertainty less than 10%.

关 键 词：校准装置 校准方法 真空漏孔 现场 

分 类 号：TB774[一般工业技术—真空技术]