回转体测量机温度误差分析及补偿  

Temperature Error Analysis and Compensation of Revolving Body Measuring Machine

作　　者：陈文亮[1] 胡毓国 李杏华[1] 洪燕[1] 

机构地区：[1]精密测试技术及仪器国家重点实验室(天津大学),天津300072

出　　处：《纳米技术与精密工程》2015年第1期22-27,共6页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(51105272)

摘　　要：针对温度对回转体测量机测量精度所产生的影响,结合ANSYS软件仿真及数学计算的方法研究了回转体测量机受温度影响产生的热变形及测量误差,分析了回转体测量机温度误差的主要表现形式.建立了一个以测量架在x方向上的平移和在z方向的倾斜为基础的误差补偿数学模型.采用双环法对测量机温度误差进行了补偿,进行了对比测量实验,实验中分别测量工件上下两个参考圆环的参数,再利用提出的数学补偿模型公式得出工件自身的误差结果,继而对测量结果进行补偿.实验数据显示:温度误差补偿模型合理有效,测量机的重复性误差从100μm以上下降为16μm左右,提出的温度误差补偿模型可以有效降低温度对测量机测量精度的影响,经过误差补偿后的测量机可适用于温度变化环境下的测量.Considering the influence of temperature on measurement precision of revolving body measur -ing machine , thermal deformation and measurement error induced by temperature were studied by combi-ning ANSYS simulation and mathematic calculation , and the main form of measurement error of revolving body measuring machine was analyzed .A mathematic model of error compensation was established based on the translation in x direction and the tilt in z direction of measuring frame .Dual-cycle method was used to compensate temperature error and then contrast experiments were carried out by measuring upper and lower reference rings respectively .Finally , the error of the workpiece was obtained with the math-ematic compensation model mentioned above , and then was used to compensate the measurement results . Experimental results show that the temperature error compensation model is effective and repeatability error was reduced from above 100 μm to about 16 μm, which can reduce the influence of temperature on measurement precision of measuring machine effectively and the measuring machine after compensation can work well under the environment with changing temperature .

关 键 词：回转体 热变形 数学模型 误差补偿 

分 类 号：TH71[机械工程—测试计量技术及仪器]