基于可编程多轴控制器的红外传感器片上测试系统设计  

The Design of the Infrared Sensor Test System on Chip Based on PMAC Motion Controller

作　　者：叶雨欣[1] 焦斌斌[2] 孙灵芳[1] 孔延梅 刘瑞文[2] 

机构地区：[1]东北电力大学自动化工程学院,吉林132012 [2]中国科学院微电子研究所,北京100029 [3]昆山光微电子有限公司,昆山214028

出　　处：《科学技术与工程》2014年第34期213-218,共6页Science Technology and Engineering

基　　金：国家高技术研究发展计划(SS2013AA041109)资助

摘　　要：探针测试台是一种传统半导体工艺中间测试设备,用于在硅片划片前测试电子器件性能、良率,并给出其在晶圆上分布的映射图表。目前国内外自动或半自动探针测试台都是针对传统IC电路设计,采用封闭式结构,无法根据传感器多变的特性、复杂的测试环境需求完成对器件的片上测试。采用美国Delta Tau公司推出的PMAC可编程多轴运动控制器作为核心控制系统,构建了一套针对红外热电堆器件特殊测试需求的批量化片上测试系统。该测试系统具有响应速度快、控制精度高、可扩展性强的特性,不仅可满足红外热电堆器件的片上批量化测试需求,还可通过定制性的模块删减以满足不同传感器的片上测试。Probe station is a kind of conventional equipment in semiconductor process test,usually used for device electric performance testing,and giving wafer distribution mapping before silicon dicing. Current automatic probe station for domestic use mostly imported,use the enclosed structure,which cannot be based on device characteristics,the test environment needs to build targeted semiconductor test systems. The U. S. Delta Tau company＇s PMAC programmable multi-axis motion controller products was used as the core control system to built an automatic probe station for wafer-level Testing of Thermopile IR Detectors. The test system has a fast response,high control accuracy,scalability and strong features,meet the requirements of wafer-level Testing of Thermopile IR Detectors.

关 键 词：可编程多轴控制器(programmable MULTI-AXIS controller PMAC) 自动探针台 开放式数控系统 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]