用于金属薄膜刻蚀的激光束能量分布整形研究  

STUDY ON LASER BEAM SHAPING FOR ABLATION OF METALLIC FILM

作　　者：杨建平[1] 陈学康[1] 吴敢[1] 王瑞[1] 

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2015年第1期38-41,共4页Vacuum and Cryogenics

基　　金：国家重点自然科学基金NSFC(51135005)

摘　　要：针对碳纤维复合材料基底上的金属薄膜图形刻蚀需求,研究了一种基于光学波前衍射变换原理的能量/激光功率密度分布整形方法,并设计制作了衍射元件。利用基模(TEM00)和非基模输出的红外激光分别进行了验证实验,用整形后的激光光束进行刻蚀,金属薄膜被完全去除,刻蚀边界锋锐整齐,基底没有可见的损伤。衍射元件对于基模模式输出激光的转换效率为71%,对非基模模式的转换效率为53%。Laser ablation result is related to the distribution of laser power density,especially for metal film ablation.A method of shaping laser power density distribution based on wave front diffraction transform was described in this paper,and a Laser optical diffraction component was designed and fabricated using this method. Verification experiment oflaser power shaping ability was carried out using initial phase（TEM00）and multi phase laser,and the result indicated thatboth of the original laser beams were transformed by employing diffractive optical component. Conversion efficiency ofdiffractive optical component is 71% for initial phase condition,and 53% for multi phase.

关 键 词：激光刻蚀 能量密度分布 衍射元件 光束整形 

分 类 号：O436[机械工程—光学工程]