油扩散泵返油率的控制分析  

Control analysis of the oil back-streaming rate of oil diffusion pump

作　　者：张静[1] 王栋庆 

机构地区：[1]宝钛集团有限公司,陕西宝鸡721014

出　　处：《真空》2015年第1期57-59,共3页Vacuum

摘　　要：基于真空系统油扩散泵的工作原理,分析油扩散泵返油的原因,总结出油扩散泵控制返油的方法;引用实例阐述如何查找返油原因;并根据具体原因采取具体措施,以降低油扩散泵的返油率。Based on the working principle of oil diffusion pump, analyze the reasons of oil back-streaming and the control method was also concluded. Taking example to describe bow to find the reasons for returning oil and corresponding measurements are adopted according to the reasons to reduce the back-streaming rate of oil diffusion pump.

关 键 词：真空系统 油扩散泵 返油 

分 类 号：TH36[机械工程—机械制造及自动化]