沉积温度对类金刚石涂层表面形貌和性能的影响  

Effects of Deposition Temperature on Surface Morphology and Performance of Diamond-like-Carbon Coatings

作　　者：纪锡旺 郝俊文[1] 许振华[2] 何利民[2] 何志宏 甄洪滨 

机构地区：[1]华东理工大学机械与动力工程学院,上海200237 [2]北京航空材料研究院,北京100095 [3]第二炮兵驻红阳机械厂军代表室,孝感432100 [4]赛屋涂层技术有限公司,天津300308

出　　处：《机械工程材料》2014年第11期40-45,共6页Materials For Mechanical Engineering

摘　　要：采用直流等离子体增强化学气相沉积(DC-PECVD)技术,在不同温度下于YG8硬质合金基体上沉积了类金刚石(DLC)涂层,探讨了沉积温度对DLC涂层结构、表面形貌、厚度、显微硬度、耐磨损性能以及界面结合性能的影响。结果表明:随着沉积温度的升高,DLC涂层中sp3键的比例呈先增大后减小的趋势,并在160℃达到最大,为69%;沉积温度过高将导致DLC涂层出现石墨化;DLC涂层的厚度、显微硬度、耐磨损性能、界面结合力均随沉积温度的升高呈先增大后减小的趋势,当沉积温度为160℃时,涂层表面平整光滑、致密,此时涂层的厚度、显微硬度和界面结合力均达到最大,分别为3.2μm、2 395HV和63N;DLC涂层的显微硬度、抗磨损能力、厚度和界面结合强度随沉积温度的变化规律与sp3键含量密切相关。A series of diamond-like-carbon（DLC）coatings were deposited on YG8 cemented carbide substrate by direct current plasma enhanced chemical vapor deposition（DC-PECVD）technology at different temperatures.The effects of deposition temperature on structure,surface morphology,thickness,micro-hardness,wear resistance and interface bonding performance of the DLC coatings were studied.The results show that the proportion of sp3 valence bond increased and then decreased with the increase of the deposition temperature,and the proportion was up to 69% when the deposition temperature was 160 ℃.The DLC coating would graphitizing at excessive temperature.The thickness,microhardness,wear resistance and interface bonding force increased and then decreased with the increase of the deposition temperature.When the deposition temperature was 160℃,the surface of the coating was smooth and compact,and the thickness,micro-hardness and interface bonding force were maximum,they were 3.2μm,2 395 HV and 63 N,respectively.The variation of the microhardness,wear resistance,thickness and interface bonding performance of the DLC coatings with deposition temperature was closely related to the content of sp3 valence bond.

关 键 词：直流等离子体增强化学气相沉积技术 类金刚石涂层 沉积温度 

分 类 号：TG174[金属学及工艺—金属表面处理]