绝对式光栅尺细分误差补偿方法  

A Method for Compensating Interpolation Error of Absolute Linear Encoder

作　　者：乔栋[1,2] 续志军[1] 吴宏圣[1] 曾琪峰[1,2] 刘阳[1] 孙强[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《光学学报》2015年第1期212-217,共6页Acta Optica Sinica

基　　金：国家科技重大专项(2013ZX04007021)

摘　　要：为了提高绝对式光栅尺的细分精度,提出了一种细分误差补偿方法。对绝对式光栅尺A、B两路叠栅条纹信号进行傅里叶分析,建立叠栅条纹信号模型;对信号模型中的相位、振幅、谐波、直流分量进行校正,得到理想叠栅条纹信号的模型;对比实际信号模型和理想信号模型的细分位置,得到绝对式光栅尺的细分误差;根据该误差对细分值进行补偿,提高细分精度。通过使用JC09型绝对式光栅尺对该方法进行验证,可使其细分相对误差从2.70%降低到1.05%。实验结果表明,该方法能够有效地提高绝对式光栅尺细分精度,且该方法具有原理简单、易于实现的优点。In order to improve the interpolation accuracy of the absolute linear encoder, a compensating method for the interpolation error is presented. By using the Fourier theory to analyze the A and B moire fringe signals, the moire fringe signal models for the absolute linear encoder is set up. By correcting the phase, amplitude, harmonics and direct current components of the signal modes, the ideal signal models are obtained. By comparing the interpolation position of the practical and ideal signal models, the interpolation error of the absolute linear encoder is obtained. After that, by compensating the interpolation position according to the obtained error, the interpolation accuracy can be improved remarkably. The JC09 absolute linear encoder is used to test and verify the presented method. The test results show that the interpolation relative error can be decreased from 2.70% to 1.05%. It demonstrates that this method can improve the interpolation accuracy significantly. In addition, due to the simple theory, the method can be easily realized.

关 键 词：测量 细分误差 傅里叶分析 绝对式光栅尺 叠栅条纹 

分 类 号：TH711[机械工程—测试计量技术及仪器]