随机相移误差的Lissajous标定与校正  

Correction of Random Phase-shifts Errors Based on Lissajous Calibration

作　　者：刘锋伟[1,2] 吴永前[1] 伍凡[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]中国科学院大学,北京100049

出　　处：《光电工程》2015年第2期89-94,共6页Opto-Electronic Engineering

基　　金：国家自然科学基金资助项目(61108045)

摘　　要：将Lissajous标定技术应用到相移干涉测量的相移算法(PSA)中,提出一种基于Lissajous标定技术的随机相移误差校正算法。该算法不需要计算各帧干涉图之间的实际相移量,直接用Lissajous标定和椭圆拟合的方法计算相移算法的相位提取误差(包括离焦、偏倚、相移量偏差)然后进行校正。数值模拟结果表明:该算法不需要迭代运算就能从大于3帧的带有随机相移误差的干涉图中有效恢复出正确的相位信息,运算时间少,计算精度高并且适合于所有的相移算法。实验结果表明:基于Lissajous标定技术的随机相移误差校正算法与现有的迭代随机相移算法(AIA)精度相当,但计算速度得到明显提升。An algorithm of correction of random phase-shifts error is proposed by applying Lissajous calibration technology to PSI. Proposed method does not have to calculate the true phase shifts of each interferogram, which directly estimate the phase extraction error （typically a non linear combination of offset, bias, less of quadrature） of PSA first and then correct them. Simulation results show that proposed method can effectively correct the phase extraction error from a series of （〉3） interferograms with random phase-shifts errors without any iterations. The algorithm is fast, accurate and adapt to all kinds of PSAs. Experimental results indicate that proposed method has a comparative precision with AIA but is far faster than AIA.

关 键 词：干涉测量 Lissajous 标定 随机相移误差 

分 类 号：O436[机械工程—光学工程]