一种新型SAW气体传感器的设计  

Design of a Novel SAW Gas Sensor

作　　者：王露[1] 王登攀[1] 杜波[1] 鄢秋娟[1] 张静雯[1] 唐永亮[2] 杨靖[1] 江洪敏[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060 [2]电子科技大学物理电子学院,四川成都610054

出　　处：《压电与声光》2015年第1期20-23,共4页Piezoelectrics & Acoustooptics

基　　金：预研基金资助项目(9140A23070113DZ36067)

摘　　要：提出了将纳米线技术与声表面波(SAW)技术相结合,分别利用纳米线气体敏感材料比表面积高,声表面波传感器质量敏感性高的优点,探索研制新一代声表面波气体传感器。该传感器具有响应速度快,灵敏度高,体积小,质量注和易集成等优点。该文主要从SAW专用芯片的研制、专用纳米线研制、专用纳米线的表面修饰与改性研究、检测电路设计等4方面进行了阐述。理论计算表明,相比传统二维结构的SAW气体传感器,三维纳米线结构的SAW气体传感器的在灵敏度和响应速度上都得到提高。By integrating of nanowire technology with surface acoustic wave（SAW）technology and taking the advantage of high specific surface area of nanowire gas sensitive materials and high mass sensitivity of SAW sensor,a new generation SAW gas sensor has been developed.The sensor has the advantages of fast response speed,high sensitivity,small bulk,small weight and easy to integrate.Four aspects of sensor including developing of special SAW chip,developing of special nanowire,research of special nanowire surface decorating and modifying,detecting circuit designing are presented in this paper.The simulation results indicate that comparing to conventional 2-D structure SAW gas sensor,the 3-D nanostructure SAW gas sensor′s sensitivity and response speed are greatly improved.

关 键 词：声表面波 纳米线 气体传感器 比表面积 灵敏度 

分 类 号：TN65[电子电信—电路与系统]