加速度地震检波器简谐振子有限元分析  

Finite Element Analysis for Harmonic Oscillator of Acceleration Seismic Geophone

作　　者：恩德[1] 邓三星[1] 孙攀[1] 陈亚柯[1] 张宁波[1] 

机构地区：[1]河南理工大学电气工程与自动化学院,河南焦作454001

出　　处：《压电与声光》2015年第1期176-178,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然基金资助项目(41074090);河南省科技计划重点攻关项目资助(022102210360)

摘　　要：介绍简谐振子的工作原理。利用ANSYS软件,采用有限元法创建了简谐振子质量块的实体模型,选择单晶硅作为简谐振子中质量块的材料;设置了模型的材料属性,采用智能分网的方式对模型划分网格,并对质量块模型施加沿x轴水平方向载荷,进行三维的静力分析和模态分析。静力分析得到实体模型的总位移是0.236×10-19μm;模态分析时只对前四阶模型进行了分析,根据其振型图及其总位移的应力云图,得到实体模型的二十阶振动模态的频率是78 001Hz,二十阶的总位移是0.122×10-6μm。The working principle of the harmonic oscillator is introduced.Using the soft of ANSYS,the solid model of harmonic oscillator mass is created by adopting the finite element method.Single crystal silicon is chosen as the material of mass of harmonic oscillator.The material attributes of modal is set and the modal is meshed by ways of smart meshing.Then a horizontal load is applied along with the X axis for the static analysis and modal analysis.The total displacement of physical model by static analysis is 0.236×10^-19μm.Only the fourth-order of modal is analyzed by modal analysis.According to the vibration mode and the stress nephogram of total displacement,the twentieth-order vibration mode frequency of physical models is 78 001 Hz and the total displacement is 0.122×10^-6μm.

关 键 词：微光机电系统(MOEMS)三分量加速度地震检波装置 简谐振子 质量块 有限元 位移 

分 类 号：TN256[电子电信—物理电子学]