铒铥共掺氧化锌薄膜近红外宽带发射及变温行为的研究  

Near infrared broadband from Er-Tm codoped zinc oxide and temperature-dependent properties

作　　者：陈丹丹[1] 徐飞[1,2] 曹汝楠 蒋最敏[2] 马忠权[1] 杨洁[1] 杜汇伟[1] 洪峰[1] 

机构地区：[1]上海大学理学院物理系,索朗光伏材料与器件R&D联合实验室,分析测试中心,上海200444 [2]复旦大学,应用表面物理国家重点实验室,微纳光子结构教育部重点实验室,先进材料实验室,上海200433

出　　处：《物理学报》2015年第4期302-308,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:50602029;61274067;60876045);上海市基础研究重点项目(批准号:09JC1405900);上海大学课程建设项目(批准号:B.08-0101-14-111)资助的课题~~

摘　　要：采用磁控共溅射技术制备了铒铥共掺杂氧化锌发光薄膜.通过优化退火温度,实现了薄膜的近红外平坦宽带发射,总带宽可达到～500 nm,覆盖了光通信S+C+L+U区波段.此发射带由Er3+的1535 nm(4I13/2→4I15/2)发射峰及Tm3+的1460 nm(3H4→3F4),1640 nm(1G4→3F2),1740 nm(3F4→3H6)发射峰组成.研究表明:退火温度低于800°C时,没有观察到薄膜样品明显的光致发光现象;随着退火温度从800°C升高到1000°C,I1640/I1535发射峰强度比从0.2升高到0.3,I1740/I1535发射峰强度比从0.5降低到0.4,发射峰强度比均基本保持稳定;当退火温度高于1000°C时,I1640/I1535发射峰强度比从0.3升高到0.6,I1740/I1535发射峰强度比从0.4升高到0.8,发射峰强度比均急剧增加.变温行为表明:随着温度从10 K逐渐升高到300 K,谱线的总带宽基本不变,在340—360 nm之间;Tm3+在1640和1740 nm处的发射峰强度分别降低了2/3和1/2,Er3+在1535 nm的发射峰强度增大了1.2倍.这是因为随着温度的升高,声子数目增多,Er3+与Tm3+离子之间发生能量传递的概率不断变大,并且在Tm3+离子之间没有发生交叉弛豫现象.Er-Tm codoped ZnO thin film is synthesized by co-sputtering from separated Er, Tin, and ZnO targets. A flat and broad emission band is achieved in a range of 1400-2100 nm by optimizing annealing temperature, and the observed 1460, 1540, 1640 and 1740 nm emission bands are attributed to the transitions of Tm3＋： 3H4 →3F4, Er3＋ 4Ⅰ13/2 →4Ⅰ15/2, Tm3＋ 1G4 →3F2 and Tm3＋ 3F4→3H6 transitions, respectively, which cover S, C, L, U bands. The intensity ratios of 1640 to 1535 nm and 1740 to 1535 nm below 1000 ℃ are nearly constant, while the ratios increase sharply above 1000 ℃. The temperature dependence of photoluminescence （PL） spectrum is studied under 10 300 K. With increasing the operation temperature, the bandwidth of broadband is nearly invariable （340-360 nm）, and the Tm3＋ PL emission intensities of 1640 nm and 1740 nm from Er-Tm co-doped ZnO thin film decrease by a factor of 1.5 and 2, respectively. Moreover, the 1535 nm emission intensity is increased by a factor of 1.2. This phenomenon is attributed to the complicated energy transfer （ET） processes involving both Er3＋ and Tm3＋ and the increase of phonon-assisted ET rate with temperature as well. And the cross relaxation between Tm3＋ ions does not occur.

关 键 词：稀土掺杂 氧化锌薄膜 近红外宽带发光 退火处理 

分 类 号：O484.4[理学—固体物理]