大型衍射光栅刻划机微定位系统控制器设计  

Design of the controller of the micro-positioning system for large diffraction grating ruling engine

作　　者：糜小涛[1] 于宏柱[1] 高键翔[1] 于海利[1] 张善文[1] 齐向东[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033

出　　处：《仪器仪表学报》2015年第2期473-480,共8页Chinese Journal of Scientific Instrument

基　　金：国家重大科研装备研制项目(ZBY2008-1);国家重点基础研究发展计划项目(2014CB049500);吉林省科技发展计划项目(20140203011GX);长春市科技计划项目(Y3B43HU140)资助

摘　　要：针对衍射光栅刻划机开环控制的定位精度不能满足指标要求的问题,在刻划机已有的状态和结构下,设计了微定位系统的控制器。首先,介绍了衍射光栅刻划机,分析了微定位系统及其定位精度指标。然后,运用系统辨识的方法,设计了微定位系统的扫频实验,建立其数学模型。接着,提出了在已有数学模型的基础上,运用实际测量数据和MATLAB/Simulink软件仿真试凑来设计控制器的方法,并设计了满足精度指标要求的控制器。最后,将设计的控制器应用于微定位系统并进行模拟刻划实验,实验结果可知:所设计的微定位系统控制器定位精度基本满足指标要求,其中峰-峰值小于40 nm,RSM值总体略大于2.8 nm。Aiming at the problem that the open-loop control positioning accuracy of diffraction grating ruling engine does not meet the requirement of the specification,the controller of the micro-positioning system was designed under the existing state and structure conditions of the diffraction grating ruling engine.Firstly,the diffraction grating ruling engine is introduced,the micro-positioning system of the diffraction grating ruling engine and its positioning accuracy specification are analyzed.Then,using the system identification method,the frequency sweep experiment of the micro-positioning system is designed,and its mathematical model is established.And then,on the basis of the existing mathematical model,a design method is proposed,which uses the actual measurement data and MATLAB / Simulink software to design the controller with simulation and trial.Using this method,the controller that meets the requirements of the specification was designed.Finally,the designed controller was applied in the micro-positioning system and the simulation ruling experiments were conducted.The experiment results show that the designed controller basically meets the positioning accuracy specification requirement of the micro-positioning system;the peak-peak error is less than 40 nm,and the RSM error is slightly larger than 2.8 nm in total.

关 键 词：微定位系统 控制器设计 数学模型 定位精度 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置] TH113.2[自动化与计算机技术—控制科学与工程]