1064nm、532nm、355nm波长脉冲激光辐照多晶硅损伤特性研究  

Damage characteristics of polysilicon under wavelengths of 1064 nm, 532 nm and 355 nm laser irradiation

作　　者：冯爱新[1,2,3] 庄绪华[2] 薛伟[1] 韩振春[4,2] 孙铁囤 陈风国[2] 钟国旗 印成[2] 何叶[2] 

机构地区：[1]温州大学机电工程学院,浙江温州325035 [2]江苏大学机械工程学院,江苏镇江212012 [3]常州亿晶光电科技有限公司,江苏常州213200 [4]江苏锐成机械有限公司,江苏无锡214206

出　　处：《红外与激光工程》2015年第2期461-465,共5页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(51175237);中国博士后基金(20100481096);江苏省博士后基金(1002029C);江苏大学高级人才启动基金(09JDG090);江苏省"六大人才高峰"A类项目;江苏省企业博士集聚计划项目;江苏大学"拔尖人才培养工程"优秀青年学术骨干培养对象课题项目

摘　　要：为系统研究不同波长激光与多晶硅材料的相互作用,采用1 064 nm、532 nm、355 nm波长单脉冲激光对多晶硅进行辐照实验,研究多晶硅在这三种波长激光下的损伤形态。实验结果表明:在其他参数不变的情况下,损伤阈值随激光波长的减小而变小,且与波长呈线性关系;在低能量密度水平下,355 nm激光与物质作用主要是以光化学模型为主的光化学-光热共同作用方式,其他波长为光热模型;在激光能量密度处于低水平时,辐照区域出现相互连接的规则六边形微结构,并且六边形中心呈现圆形凸起状态,其产生是由液体横向流动的波动本质造成的,并与多晶硅表面的粗糙度有关。The wavelengths of 1 064 nm, 532 nm and 355 nm single-pulse laser were used to irradiate the polysilicon to study the interaction between different wavelengths of laser with polysilicon material systematically. The damage patterns of the polysilicon under the three laser wavelengths were studied.Experimental results shows that： with other parameters unchanged, the damage threshold decreases with the laser wavelength becomes smaller and it has linear relationship with laser wavelength; At low energy density level, the model of the interaction between the wavelength of 355 nm laser and material is photochemical model based on the photochemical-photothermal common mode of action and it is light and heat model for other wavelengths; When the laser energy density is in low level, the interconnected regular hexagonal microstructure appears in the irradiated area. The center of the hexagon presents circular convex status. It is generated by nature of lateral flow fluctuations of the liquid and it has relation with the roughness of the polysilicon surface.

关 键 词：波长 多晶硅 损伤阈值 微结构 

分 类 号：TN249[电子电信—物理电子学]