0-89°的金属二次电子发射系数的通式  

Secondary Electron Emission at Incident Angle in 0° to 89° Range

作　　者：谢爱根[1] 陈云云[1] 王祖松[1] 仲坤[1] 

机构地区：[1]南京信息工程大学物理与光电工程学院,南京210044

出　　处：《真空科学与技术学报》2015年第2期150-155,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(No.11473049);江苏省高校自然科学基金(No.13KJB140007)

摘　　要：根据二次电子发射的物理特性和过程,以θ角射入原子序数为Z的金属的每个原电子发射的二次电子数（δPEθZ）、原电子的入射能量（Wp0）、cosθ和参数Y（θ,Z）之间的关系被推导出来了。根究实验结果,得出Wp0为2-10keV的比率βθ、Wp0和cosθ之间的关系式。根据二次电子发射系数δθ和二次电子发射系数δ0之间的关系,Wp0为2-10keV的δθ、δ0、背散射系数η0、背散射系数ηθ、参数Y（θ,Z）、Wp0和cosθ之间的关系式（r）被推导出。根据r、实验结果、ηθ和η0的表达式,得出参数Y（θ,Z）、Z和θ之间的关系式。以δ0、η0、ηθ、cosθ的[1.08-0.59（θ/90）12]（20/Z）0.07407次方、Wp0和cosθ为变量的Wp0为2-10keVδθ的通式被推导出。用该通式计算出来的二次电子发射系数与实验的铝、镍、铅和铍二次电子发射系数分别进行了比较。结果表明：推导的二次电子发射系数的通式可以用来估算Wp0为2-10keV和θ为0-89°的二次电子发射系数。Here,we addressed the secondary electron（SE）yield originated from the primary electrons incident at an angle up to 89°,a subject of basic and technological interest in space industry.The influence of the minor variables,such as the penetration depth and energy loss of the primary electron incident at an angle near 90°,as well as dependence of back-scattering coefficient on atomic number（Z）,on the SE emission rate was theoretically investigated.The SE yield was empirically approximated,physically modeled,and analytically described in terms of the major variables,including but not limited to the incident angle（0°-89°）and energy（2-10keV）of primary electrons,atomic number of metal（Z）,Z-dependent back-scattering coefficient,and etc.The SE yields from metals of Al,Ni,Pb and Be were measured and calculated with the newly-developed ＂universal＂formula,respectively.The calculated and measured results were found to be in fairly good agreement.

关 键 词：二次电子发射系数 比率 入射角 金属 通式 

分 类 号：O622.1[理学—有机化学]