基于晶圆优先级的连续型Interbay搬运系统性能分析  

Performance analysis for continuous flow transporters of Interbay AMHS with priority rules

作　　者：周炳海[1] 陈锦祥[1] 赵猛[1] 

机构地区：[1]同济大学机械与能源工程学院,上海201804

出　　处：《浙江大学学报（工学版）》2015年第2期296-302,314,共8页Journal of Zhejiang University：Engineering Science

基　　金：国家自然科学基金项目(61273035;71471135);国家"863"高技术研究发展计划项目(2009AA043000)

摘　　要：为了快速、有效地评价基于晶圆优先级的连续型Interbay自动物料搬运系统的性能,采用基于排队论的方法构建了性能分析模型.在建模过程中,为了使搬运路径多样化,引入了带外环和捷径的脊背式搬运系统.通过控制晶圆进入外环与捷径的优先级,实现了较高优先级的晶圆能快到达目的地.考虑服务时间变动性,引用相关满足系统排队实际的排队模型,构建系统期望在制品的数学表达.在相同的实验条件下,通过分析性能分析模型与Arena仿真模型得到的系统在制品量,验证本文提出的性能分析模型的准确性.实验结果表明,任何情形下的绝对误差都控制在5%以下,性能分析模型完全能满足系统性能评价的要求.To quickly and effectively estimate the performance of automated material handling systems based on wafer priority rules, queuing-based methods were applied to structure the performance analytical model. In the modeling procedure, to make the diversity of material handling routes, a spine iayout of material handling systems with crossovers and an outer ring was introduced. Through controlling the wafer priority of accessing the outer ring and shortcuts, it was come true that the wafer lot of the higher priority quickly reaches the destination. Considering the variability of service time of turntables, some queuing models which match system queuing feature were introduced to perform the analytical model. Under the same experiment conditions, through analyzing WIP values which were obtained by the analytical model and Arean simulation model, the accuracy of the proposed model was verified. Results show that absolute error is controlled fewer than 5% in any cases. Thus, the model performs well in performance analysis for continuous flow transporters of AMHSs.

关 键 词：晶圆制造 晶圆优先级 自动物料搬运系统 排队模型 interbay 

分 类 号：TP29[自动化与计算机技术—检测技术与自动化装置]