大尺寸自由曲面铝反射镜超精密抛光工艺  

Ultra-Precision Polishing Process of Large Free-Form Surface Aluminum Mirror

作　　者：潘龙[1] 宫虎[1] 房丰洲[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072

出　　处：《纳米技术与精密工程》2015年第2期108-112,共5页Nanotechnology and Precision Engineering

基　　金：国家重点基础研究发展计划(973计划)资助项目(2011CB706700);国家自然科学基金资助项目(51275344);高等学校学科创新引智计划资助项目(B07014)

摘　　要：针对大尺寸自由曲面铝反射镜在单点金刚石车削(SPDT)后出现的划伤、波纹等缺陷,研究了抛光介质和加工参数对自由曲面铝合金超精密抛光结果的影响.利用Wyko NT9300白光干涉仪和VHX500超景深显微镜对AA6061铝合金抛光表面进行了检测,将抛光前后的表面形貌以及不同条件下的抛光结果进行了比较.实验中采用质量分数不同的金刚石油性悬浮液作为抛光液,采用羊毛轮作为抛光轮,在一台精密加工中心上先后进行了平面抛光和自由曲面抛光实验.实验结果表明,工件的表面粗糙度Ra由抛光前的144.59 nm降低到了抛光后的6.03nm,其中油性润滑剂在抛光过程中起微量去除和降低划擦几率的关键作用,使用优化的工艺参数在AA6061自由曲面上获得了理想镜面.Regarding the defects of large free-form surface aluminum mirror after single point diamond turning（ SPDT）,such as scratch and corrugation,the effects of polishing media and process parameters on the ultra-precision polishing results of free-form aluminum surface were studied in this paper. The AA6061 aluminum surface topography before and that after polishing and polishing results under different conditions were compared after detecting in Wyko NT9300 white light interferometer and VHX500 digital microscope. Polishing experiments of both flat and free-form surfaces were conducted on a precision machining center with different concentrations of diamond oily suspension as polishing liquid and wool wheel as polishing wheel respectively. The surface roughness Rawas reduced from 144. 59 nm before polishing to 6. 03 nm after polishing,wherein the oil lubricant played a key role in trace removal and reducing scratching and ideal mirror surface was achieved using optimized process parameters.

关 键 词：超精密抛光 抛光工艺 自由曲面 铝反射镜 镜面 

分 类 号：TG580.692[金属学及工艺—金属切削加工及机床]