超声喷雾热解法制备AZO薄膜及其光致发光性能研究  

Preparation andphotoluminescence properties of AZO thin films deposited by ultrasonic spray pyrolysis method

作　　者：王玉新[1] 阎坤[1] 丛彩馨 宋勇[1] 孙景昌[1] 吴齐[1] 张兴元[1] 

机构地区：[1]辽宁师范大学物理与电子技术学院,辽宁大连116029

出　　处：《辽宁师范大学学报（自然科学版）》2015年第1期36-40,共5页Journal of Liaoning Normal University:Natural Science Edition

基　　金：国家自然科学基金项目(11004092);大连市科学技术基金项目(2013J21DW026)

摘　　要：利用超声喷雾热解法以乙酸锌、硝酸铝为Zn、Al源配制前驱体溶液,按不同的Zn、Al原子比(1∶0.02,1∶0.03,1∶0.04,1∶0.05和1∶0.06)在单晶硅(100)衬底上制备出具有较好光致发光性能的ZnO:Al(AZO)薄膜.采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和光致发光谱(PL)表征了样品的晶体结构、表面形貌和光致发光性能.结果表明:所制备样品属于纤锌矿ZnO结构,且择(002)取向生长,薄膜表面比较平整,具有较好的光致发光性能.并且Al掺杂量对AZO薄膜的紫外发射性能有重要影响,随着Al掺杂量的增加,紫外发射峰先蓝移后红移.在Zn、Al原子比为1∶0.04时得到的AZO薄膜结晶质量最好,蓝移量最大,光致发光性能最佳.ZnO ： Al（AZO） thin films with better phototuminescence properties were successfully prepared on Si（100） substrates by ultrasonic spray pyrolysis method using zinc acetate and aluminium nitrate at different atomic ratio of Zn and Al （1 ： 0.02,1 ： 0.03,1 ： 0.04,1 ： 0.05 and 1 ： 0.06）. Structural, morphological and photoluminescence properties of AZO thin films were investigated by X-ray diffraction （XRD）, scanning electron microscopy （SEM） and photoluminescence （PL）. Experimental results show that all the deposited films have hexagonal wurtzite ZnO structures with a preferential （002） orientation, smooth surface and better photoluminescence properties, and the Al do ping concentration has significantly effects on ultraviolet emission properties. The NBE-peaks show first blue moved to a later red-shift as A1 doping concentration increasing, The AZO thin films de posited at Zn ; Al= 1 ： 0.04 has the biggest blue shift and the optimum photoluminescence proper ties.

关 键 词：AZO薄膜 超声喷雾热解 光致发光谱 表面形貌 薄膜结构 

分 类 号：O484.1[理学—固体物理]