Ronchi剪切干涉光刻投影物镜波像差检测技术研究  

Study on Ronchi Shearing Interferometry for Wave-Front Aberration Measurement of Lithography Projection Lens

作　　者：吴飞斌[1,2] 唐锋[1] 王向朝[1] 李杰[1,2] 李思坤[1] 

机构地区：[1]中国科学院上海光学精密机械研究所信息光学与光电技术实验室,上海201800 [2]中国科学院大学,北京100049

出　　处：《中国激光》2015年第3期283-290,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(61275207;61205102;61474129;61405210);上海市自然科学基金(14ZR1444900)

摘　　要：Ronchi剪切干涉采用扩展光源调制光场空间相干性,具有干涉仪结构简单、共光路、零条纹检测等优点,适合用于光刻机投影物镜波像差原位检测。基于Ronchi剪切干涉的投影物镜波像差检测技术及系统,根据光栅衍射和空间相干性理论推导了Ronchi剪切干涉场的表达式。针对Ronchi剪切干涉仪多级衍射光寄生干涉对相位提取精度的影响,提出了一种十步相移算法,有效地消除±9级以内多级衍射的影响,理论上相位提取误差峰谷(PV)值为0.0046λ,均方根(RMS)值为0.0019λ,实验数据验证了理论推导的正确性和相位提取算法的有效性。Ronchi shearing interferometry modulates the spatial coherence of light field with extended source. With the advantages of simple structure, common- path, null- fringe detection, and so on the Ronchi shearing interferometer can be used for in situ aberration measurement of lithography projection lens. Ronchi shearing interferometry for wave-front aberration measurement of lithography projection lens is studied. The interference model of Ronchi shearing interferometer is derived by theories of grating diffraction and spatial coherence. A tenstep phase-shifting algorithm is proposed to eliminate negative effects of unwanted interference from the high order diffraction light, which limits the accuracy of phase retrieval. The effects of the first ±9 orders interference on phase retrieval accuracy can be eliminated. The peak-valley（PV） value and root mean square（RMS） value of theoretical phase retrieval error are less than 0.0046 λ and 0.0019 λ respectively. The theoretical interference model and the phase retrieval algorithm are validated.

关 键 词：测量 Ronchi剪切干涉 相位提取 波像差检测 光刻投影物镜 

分 类 号：O436[机械工程—光学工程]