金刚石车削表面微纳织构的气囊抛光改进  

Improvement of the Diamond Turned Surface Texture by Bonnet Polishing Process

作　　者：王朋[1] 杜雪[2] 回长顺[1] 

机构地区：[1]天津津航技术物理研究所,天津300380 [2]香港理工大学工业及系统工程学系超精密加工技术国家重点实验室,香港00852

出　　处：《光学学报》2015年第3期262-268,共7页Acta Optica Sinica

基　　金：香港创新与科技基金(GHP/021/11)

摘　　要：单点金刚石车削技术被广泛应用于光学表面的超精密加工。然而,车削表面固有的周期性残留刀痕结构将增强表面散射效应,恶化元件光学性能。为了抑制散射以获得高质量光学表面,采用气囊抛光技术主动改变车削表面周期性刀痕结构。基于Taguchi正交试验,以表面粗糙度及功率谱密度的改善率为设计指标,分析获得了最优抛光参数。采用该最优参数对一精车表面进行了抛光试验,抛光后表面粗糙度Ra由3.81 nm降到1.42 nm,各空间频率功率谱密度大幅降低,同时表面的衍射条纹消失。试验结果验证了所采用的抛光及相应优化方法的有效性,具有重要的工程应用价值。Single point diamond turing（SPDT） technique is widely employed in ultra-precision machining of optics.However, the inherent tool marks with strong periodicity induce scattering effects of turned surfaces, significantly deteriorating the optical performances. To suppress the scattering and accordingly achieve optical surface with high quality, the bonnet polishing method is adopted herein to actively modify structures of the residual tool marks.Taking advantage of the Taguchi experiments where the roughness and the power spectral density（PSD） of the polished surface are served as the improving criteria, the optimal polishing parameters are obtained. Polishing experiment is conducted on a fine turned surface by adopting the optimal parameters. The results indicate that the roughness Rareduces from 3.81 nm to 1.42 nm and the PSDs of surface errors in all the spatial frequencies are also significantly reduced. In addition, the inherent scattering fringes of the original surface are well eliminated,demonstrating the efficiency of the polishing method as well as the optimization method.

关 键 词：光学制造 金刚石车削 表面微观形貌 气囊抛光 参数优化 

分 类 号：O436[机械工程—光学工程]