LTCC电路加工过程质量影响因素分析  

Analysis of Factors Affecting Quality of LTCC Circuit Manufacturing Process

作　　者：党元兰[1] 赵飞[1] 唐小平[1] 严英占[1] 卢会湘[1] 

机构地区：[1]中国电子科技集团公司第54研究所,河北石家庄050081

出　　处：《电子工艺技术》2015年第2期97-101,共5页Electronics Process Technology

摘　　要：LTCC电路加工过程复杂,影响产品质量的因素众多。从加工工艺流程入手,对LTCC电路加工过程中工艺性审查、CAM处理、网版制作、丝网印刷、叠片、层压、烧结、划片等工序的质量影响因素进行深入分析,对LTCC电路加工者具有一定的参考价值。LTCC manufacturing process is a complex process, in which there are plenty of affecting factors on quality. On the basis of manufacturing process for LTCC circuit, the factors during manufacturability examining, CAM processing, screen making, screen printing, stacking, laminating, sintering and dicing processes have been deeply analyzed, which would provide certain references and guidelines for LTCC circuit manufacturers.

关 键 词：LTCC电路 工艺性审查 CA M 处理 网版制作 丝网印刷 叠片 层压 烧结 划片 

分 类 号：TN45[电子电信—微电子学与固体电子学]