浅析硅铝靶工艺气体流量对Low-E玻璃钢化前后玻面色差的影响  

Effect on Colour-difference of Low-E Glass Substrate Surface Before and After Tempering by Controlling Sputtering Process Gas Flow of Silicon Aluminum Target

作　　者：郭明 

机构地区：[1]金堆城洛阳节能玻璃有限公司,洛阳市471202

出　　处：《玻璃》2015年第3期35-39,共5页Glass

摘　　要：通过实验,详尽分析了硅铝靶使用不同溅射功率、工艺气体流量和氩/氮气比例时,Low-E玻璃钢化前后玻面色差的变化,指出为了生产高质量可钢化Low-E玻璃,在硅铝靶使用不同的溅射功率时,如何选择最优的工艺气体流量和氩/氮气比例。This paper detailedly demonstrates the change of colour-difference of Low-E glass substrate surface before and after tempering by controlling the Silicon Aluminum target sputtering process gas flow at different loaded power, presenting a method to select optimal gas flow and appropriate rate of N and Ar 2for Silicon Aluminum target at different sputtring power to produce high quality tempered low-e glass.

关 键 词：硅铝靶 工艺气体流量 LOW-E玻璃 钢化 玻面色差 溅射功率 

分 类 号：TQ171[化学工程—玻璃工业]