无线接收式MEMS毫米波功率传感器的设计  

Design of a Wireless MEMS Millimeter-Wave Power Sensor

作　　者：王德波[1] 

机构地区：[1]南京邮电大学电子科学与工程学院,南京210003

出　　处：《数学的实践与认识》2015年第6期140-147,共8页Mathematics in Practice and Theory

基　　金：江苏省青年基金项目(BK20140890);南京邮电大学校引进人才项目(NY213024)

摘　　要：为了克服传统热电式功率传感的低过载水平和实现与GaAs MMIC工艺相兼容无线功率探测,提出了一种新型的单片无线接收式MEMS毫米波功率传感器,并对其三个组成部分的设计方法进行了研究.对于功率接收部分:共面波导馈线天线,根据微带天线的设计理论,先计算出符合设计要求的尺寸,再通过仿真软件HFSS优化得到最优尺寸;对于抗过载部分:MEMS悬臂梁,采用平板电容模型来设计,再通过有限元分析软件ANSYS来做验证;对于功率检测部分,采用背面刻蚀技术来提高传感器的热传输效率和灵敏度.共面波导馈线天线的尺寸:辐射面长1840μm,宽820μm,地线宽560μm.理论计算得到的MEMS悬臂梁的下拉电压为13.05V,ANSYS仿真的下拉电压为12V,两者相对吻合.在衬底没有减薄时,负载电阻的最高温度为17.072K,热电堆的冷热两端的温差为7.588K.在减薄时,负载电阻的最高温度为32.089K,热电堆的冷热两端的温差为17.827K.In order to overcome the poor overload level of the conventional thermoelectric power sensor and realize wireless power detection with GaAs MMIC process,a novel monolithic wireless MEMS millimeter wave power sensor is proposed.The design of its three-part is introduced.For the power receiving part：the CPW-fed antenna,the design size is calculated firstly,according to the microstrip antenna design theory,and then,the size is optimized by HFSS software;For the overload part：the MEMS cantilever beam is designed by the plate capacitance model,and is validated by ANSYS software;For the power detection part,the heat transfer efficiency and the sensitivity of the sensor is improved using the back etching techniques,the size of the CPW-fed antenna：the length of radiating area is 1840μm,the width is 820μm,and the width of the ground is 560μm.The theoretical result of pull-in voltage is 13.05 V,and the simulation result by ANSYS is 12 V,which is relatively consistent.When the substrate is not thinned,the highest temperature of the load resistor is 17.072 K,and the temperature difference between the hot junction and the cold junction of the thermopile is 7.588 K.After thinning,the highest temperature is 32.089 K,and the temperature difference is 17.827 K.

关 键 词：MEMS 无线接收式 毫米波 功率传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]