不镀膜页岩样品的氩离子抛光/扫描电镜分析方法研究  

Study of Ar ion milling / SEM analysis on uncoated shale samples

作　　者：王亮[1] 章雄冬[1] 刘玉霞[1] 

机构地区：[1]中国石化华东分公司石油勘探开发研究院,江苏扬州225007

出　　处：《电子显微学报》2015年第1期33-39,共7页Journal of Chinese Electron Microscopy Society

基　　金：中石化科技资助项目(No.P12014)

摘　　要：在对氩离子抛光页岩样品的扫描电镜分析过程中,对比了镀膜与不镀膜方式的优缺点。结果显示:镀膜能够显著减轻荷电现象,而不镀膜方式能更好地获得页岩内部,特别是微孔隙结构的真实信息。在对分析条件,包括加速电压、检测器的选择及扫描速度等进行优化后,不镀膜方式也能获得荷电较少,细节清晰的抛光页岩扫描电镜图片。此外,不镀膜方式在页岩的电镜分析中具有更广的应用前景,如聚焦离子束(focus ion beam,FIB)-扫描电镜能够分析获取页岩的三维孔隙结构。Two methods including coating and uncoating are compared in SEM （ scanning electron microscopy ） analysis of shale samples polished by argon ion beam. The result shows that coating process can reduce charging phenomena remarkably, while images with uncoating way can provide more real information about shale, especially the micropores structure in nano-scale. After optimizing the analysis conditions, including acceleration voltage, detectors, scanning speed, clear SEM images of polished shale samples with less charge can be obtained in uncoating way. Meanwhile, the uncoating way can be used in shale analysis more widely, such as FIB-SEM that can analyze 3-dimension structure of micropores.

关 键 词：镀膜 氩离子抛光 扫描电镜 页岩 微孔隙 

分 类 号：P618.13[天文地球—矿床学]