石英陶瓷坩埚对多晶硅铸锭质量的影响  

Effect of Quartz Zeramic Crucible on Polysilicon Ingot Quality

作　　者：岳立喜[1] 武文双[1] 及冲冲[1] 余志永[1] 

机构地区：[1]河北联合大学迁安学院,河北唐山064400

出　　处：《铸造技术》2015年第3期779-781,799,共4页Foundry Technology

摘　　要：分别从多晶硅铸锭利用率、少子寿命和外观质量三个方面对比分析了三个不同厂家的石英陶瓷坩埚对多晶硅铸锭质量的影响。对比分析各项指标后,判断b厂家的坩埚性能优异,得到的多晶硅铸锭质量最好,适合于大规模生产。The effect of quartz ceramic crucible from three different manufacturers on polysilicon ingot quality was compared and analyzed from three aspects such as the ingot utilization rate, the minority carrier lifetime and the appearance quality of ingot. The results show that the performance of crucible from b manufacturers is excellent and the polycrystalline silicon ingot quality is best, so it is suitable for mass production.

关 键 词：石英陶瓷坩埚 多晶硅铸锭 少子寿命 利用率 

分 类 号：TN304.12[电子电信—物理电子学]