椭偏法研究ZrO_2薄膜的宽光谱特性  

Wide spectrum properties of ZrO_2 films with ellipsometry

作　　者：唐帆斌 肖峻[1] 马孜[2] 

机构地区：[1]西南民族大学电气信息工程学院,四川成都610041 [2]西南技术物理研究所,四川成都610041

出　　处：《西南民族大学学报（自然科学版）》2015年第2期192-196,共5页Journal of Southwest Minzu University(Natural Science Edition)

基　　金：西南民族大学研究生"创新型科研项目"(NO.CX2014SP268)

摘　　要：为了获得ZrO2薄膜的光学常数,采用了德国SENTECH生产的SE850宽光谱反射式光谱型椭偏仪,测量和分析了用光控自动真空镀膜机沉积在K9玻璃基底上的两个单层ZrO2薄膜样品,得到了ZrO2薄膜在380nm"2300nm宽光谱上的光学常数曲线和薄膜厚度.结果表明:样品1采用Cauchy模型和Tauc-Lorentz模型得到的厚度和光学常数结果一致;对样品2把单层ZrO2薄膜分成三层得到的均方差(MSE)比没有分层的均方差少0.381,分层得到的ZrO2薄膜的厚度的测量值与TFCalc软件的计算值非常接近,同时得到薄膜的折射率曲线.测量结果对ZrO2薄膜的薄膜设计和多层膜的制备有一定参考价值.In order to obtain the optical constants of ZrO2 thin film, two single-layer ZrO2 film samples deposited on K9 glass by optical automatic vacuum coating machine were measured and analyzed with a broadband ellipsometer SE850 produced by SENTECH. Then, the thickness of ZrO2 thin film and optical constants curve on the 380nm -2300nm spectrum were obtained. The results showed that for sample 1 the thickness and optical constants from Cauchy model were the same as Tauc-Lorentz mod- el. For sample 2 ,by dividingthe film into three layers, the smallest mean square error was obtained, and the thickness of ZrO2 thin film measured value was closest to the calculated value of TFCalc software. At the same time, the refractive index curve of the thin film was obtained. The results have certain reference value to the design and the preparation of ZrO2 multilayer film.

关 键 词：ZRO2薄膜 椭偏仪 薄膜厚度 光学常数 

分 类 号：O484.5[理学—固体物理]