扫描电镜中背散射电子成像功能的应用  

Application of Back Scattered Electron Imaging Function in Scanning Electron Microscopy

作　　者：冯善娥[1] 高伟建[1] 

机构地区：[1]苏州大学分析测试中心,江苏苏州215123

出　　处：《分析测试技术与仪器》2015年第1期54-57,共4页Analysis and Testing Technology and Instruments

摘　　要：简单介绍了扫描电镜背散射电子成像的工作原理及其应用.利用扫描电镜背散射电子成像结合X-射线能谱来研究样品的微区成分变化,从而快速的了解样品的组成和结构特征,为物相的鉴别提供了有效的分析手段.The basic principle and application of the back scattered electron （BSE） images of scanning electron microscope （SEM） is described. BSE imaging combined with X-ray energy dispersive spectrum of SEM was used to study the composition changes in the micro areas of samples, so as to understand the composition and structure characteristics of samples in a short time, thus providing an effective analysis method for the phase identification.

关 键 词：扫描电镜 背散射 成分衬度 

分 类 号：O657.62[理学—分析化学]