光栅副间隙动态测量设备的设计  

Design an Equipment to Dynamically Measure the Gap between Pair Gratings

作　　者：张雪鹏[1] 吴宏圣[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《机电产品开发与创新》2015年第2期26-28,共3页Development & Innovation of Machinery & Electrical Products

基　　金：国家重大科技专项(2013ZX04007-021);长春市科技计划项目(高集成化单码道绝对式光栅尺研发-2013254)

摘　　要：基于光学测量和图像处理,设计了一种用于测量光栅尺读数头装配过程中指示光栅装配时光栅副间隙的设备。试验测量结果表明,设备测量结果可靠,全区间测量误差<5%,使用区间测量误差<3%。为光栅副装配中间隙测量提供了可靠的测量方法和设备。Based on optical measurement and image processing, design an equipment to measure gap of pair grating in the process of assem- bling grating ruler reading head. Test result shows that, measurement results of the equipment are reliable, measurement error between the range 〈5%, measurement error between frequently used range 〈3%. Provide reliable measuring method and equipment for measure the gap of pair gratings in the process of assembling pair gratings.

关 键 词：光栅尺 光栅副 间隙测量 

分 类 号：TH71[机械工程—测试计量技术及仪器]