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机构地区:[1]新乡学院物理与电子工程学院,河南新乡453003 [2]重庆理工大学化学化工学院,重庆400054 [3]焦作市技师学院电气工程系,河南焦作454003
出 处:《新乡学院学报》2015年第3期9-13,共5页Journal of Xinxiang University
摘 要:在N2和高浓度CH4条件下,利用等离子体增强热丝化学气相沉积法在Si衬底上合成了纳米石墨。用场发射扫描电子显微镜、场发射透射电子显微镜和显微Raman光谱仪研究了纳米石墨的结构和成分,结果表明:增大反应气体中N2的浓度可以增加纳米石墨中的缺陷,减小纳米石墨颗粒大小。根据表征结果,分析了N2对纳米石墨结构影响的原因。研究结果能够丰富碳基纳米材料的知识,并为碳基纳米材料的应用奠定了基础。Nanographite was synthesized on silicon substrate by plasma-enhanced hot filament chemical vapor deposition under the condition of nitrogen and high concentration of methane. The structure and composition of synthesized nanographite were investigated by advanced characterization instruments including field emission scanning electron microscope, field emission transmission electron microscope and micro-Raman spectroscope. The results indicated that the increased concentration of nitrogen in the reactive gases enhanced the defects in nanographite and lowered the size of nanographite particles. According to the characterization results, the effects of nitrogen on the structure of nanographite were analyzed. The research has enriched our knowledge on the carbon-based nanomaterials and contributed to the applications of carbon-based nanomaterials.
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